Lecturer in charge: Prof. Elizabeth von Hauff, Dr. Agne Zukauskaite
This course is offered in englisch language since winter term 2022/23. It is aimed at students of electrical engineering, nanoelectronic systems, mechanical engineering, physics, chemistry, and other technical programs.
OPAL-course (further information and educational materials)
Teil des Moduls
ET-12 11 05 Plasma Technology
Lecturer in charge: Prof. Dr. Elizabeth von Hauff
Contents
The module contents include:
1. The fundamentals of plasma physics, industrial plasma processes, and process tool design
2. Basics of thin film growth, hard coatings and barriers, glass and optical coatings, electronic and functional coatings, and treatment technologies.
Objectives
Students have a fundamental understanding of the physics of plasmas used in industrial processes and tools. Furthermore, they are able to choose suitable technical plasma sources and plasma process tools for specific applications. In addition they can name typical examples for layers and layer stacks used in major application fields for coatings.
NES-ET-E-PlaTe Plasma Technology
Lecturer in charge: Prof. Dr. Elizabeth von Hauff
Contents
The module contents include:
1. The fundamentals of plasma physics, industrial plasma processes, and process tool design
2. Basics of thin film growth, hard coatings and barriers, glass and optical coatings, electronic and functional coatings, and treatment technologies.
Objectives
Students have a fundamental understanding of the physics of plasmas used in industrial processes and tools. Furthermore, they are able to choose suitable technical plasma sources and plasma process tools for specific applications. In addition they can name typical examples for layers and layer stacks used in major application fields for coatings.
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